Several methods to improve the linearity of AMR sensors

WANG Lijin

doi:10.13374/j.issn1001-053x.2006.08.008

Volume 28 Issue 8

Aug. 2021

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WANG Lijin. Several methods to improve the linearity of AMR sensors[J]. Chinese Journal of Engineering, 2006, 28(8): 744-749. doi: 10.13374/j.issn1001-053x.2006.08.008

Citation:

WANG Lijin. Several methods to improve the linearity of AMR sensors[J]. Chinese Journal of Engineering, 2006, 28(8): 744-749. doi: 10.13374/j.issn1001-053x.2006.08.008

WANG Lijin. Several methods to improve the linearity of AMR sensors[J]. Chinese Journal of Engineering, 2006, 28(8): 744-749. doi: 10.13374/j.issn1001-053x.2006.08.008

Citation:

WANG Lijin. Several methods to improve the linearity of AMR sensors[J]. Chinese Journal of Engineering, 2006, 28(8): 744-749. doi: 10.13374/j.issn1001-053x.2006.08.008

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Several methods to improve the linearity of AMR sensors

doi: 10.13374/j.issn1001-053x.2006.08.008

WANG Lijin

Materials Science and Engineering School, University of Science and Technology Beijing, Beijing 100083, China

Received Date: 2005-05-30
Rev Recd Date: 2005-09-15

Available Online: 2021-08-24

Abstract

Abstract

Several methods to improve the linearity of anisotropic magnetoresistance (AMR) sensors were suggested based on the analysis of the generation of nonlinearity in magnetoresistive sensors of metallic films. Ni₈₀Fe₂₀ and Ni₆₅Co₃₅ AMR thin films were prepared by DC magnetic sputtering. Some AMR sensors were made by the micro-fabrication technique, and the testing results were also presented.
- metallic films,
- anisotropic magnetoresistance effects,
- sensor,
- linearity,
- microfabrication