Performance optimization of the wafer conveyor handling system using the crossover retrial rule

ZHOU Bing-hai; CHEN Li-yang

doi:10.13374/j.issn2095-9389.2019.02.014

Volume 41 Issue 2

Feb. 2019

Turn off MathJax

Article Contents

Article Navigation > Chinese Journal of Engineering > 2019 > 41(2): 261-268

ZHOU Bing-hai, CHEN Li-yang. Performance optimization of the wafer conveyor handling system using the crossover retrial rule[J]. Chinese Journal of Engineering, 2019, 41(2): 261-268. doi: 10.13374/j.issn2095-9389.2019.02.014

Citation:

ZHOU Bing-hai, CHEN Li-yang. Performance optimization of the wafer conveyor handling system using the crossover retrial rule[J]. Chinese Journal of Engineering, 2019, 41(2): 261-268. doi: 10.13374/j.issn2095-9389.2019.02.014

Citation:

PDF( 1209 KB)

Performance optimization of the wafer conveyor handling system using the crossover retrial rule

doi: 10.13374/j.issn2095-9389.2019.02.014

School of Mechanical Engineering, Tongji University, Shanghai 201804, China

More Information

Corresponding author: ZHOU Bing-hai, E-mail: bhzhou@#edu.cn
Received Date: 2017-12-30
Publish Date: 2019-02-01

Abstract

Abstract

The semiconductor wafer fabrication system is one of the most complex discrete manufacturing systems owing to its great number of production steps, heavy re-entry production flow, various kinds of products, etc. The automatic material handling system plays a key role in improving the production efficiency, reducing the work in process (WIP), and shortening the production cycle time of the semiconductor factory. To rapidly and effectively evaluate the impact of crossover systems on the overall performance of transport systems in wafer production, a performance analysis model was built by mathematical analysis and a decision-making method of crossovers was established. In the modeling procedure, the retrial transportation rule was first introduced. Then, considering the change in retrial rate affected by the crossovers strategy and referencing the related retrial queuing model, the mathematical expression of the expected WIP was constructed. Simultaneously, according to the cost of each crossover, the mathematical expression of the cost of crossovers was built. The optimization analysis model was obtained with the objective of minimizing the number of crossovers and WIP. Furthermore, the constraint conditions based on the length of the conveyor belt were introduced, so that the number of WIP products on each conveyor belt and crossover would not exceed the capacity limit of the conveyor belt. Finally, the NSGA-Ⅱ algorithm was used to solve the multi-objective optimization problem. The relation between the number of WIP and cost of crossovers under different logistics loads was investigated, and Pareto frontier charts were drawn up for comparative analysis. The influence of parameter settings on the objective function of the system was studied, and the solution set was classified by clustering the analysis algorithm. Based on the aboveanalysis results, the best strategy of system crossovers was summarized. By comparing the proposed system with the existing system and transportation strategy, the effectiveness of the strategy in reducing cost and WIP was confirmed.
- wafer fabrications,
- crossover-optimization,
- automatic material handling system,
- retrial queuing model,
- interbay system

FullText(HTML)

References(14)

References

[1]	Nadoli G, Pillai D. Simulation in automated material handling systems design for semiconductor manufacturing//Proceedings of the 1994 Winter Simulation Conference. Lake Buena Vista, 1994: 892
[2]	Davis J. 450 mm wafer transition needs collaboration and standards. Solid State Technol, 2011, 54(6): 14 http://www.researchgate.net/publication/297288526_450mm_wafer_transition_needs_collaboration_and_standards
[3]	Pettinato J S, Pillai D. Technology decisions to minimize 450-mm wafer size transition risk. IEEE Trans Semicond Manuf, 2005, 18(4): 501 doi: 10.1109/TSM.2005.858471
[4]	Bozer Y A, Hsieh Y J. Throughput performance analysis and machine layout for discrete-space closed-loop conveyors. ⅡE Trans, 2005, 37(1): 77 doi: 10.1080/07408170590516971
[5]	Nazzal D, Johnson A, Carlo H J, et al. An analytical model for conveyor based AMHS in semiconductor wafer fabs//Proceedings of the 2008 Winter Simulation Conference. Miami, 2008: 2148
[6]	Nazzal D, Jimenez J A, Carlo H J, et al. An analytical model for conveyor-based automated material handling system with crossovers in semiconductor wafer fabs. IEEE Trans Semicond Manuf, 2010, 23(3): 468 doi: 10.1109/TSM.2010.2051736
[7]	Zhou B H, Chen J X. Queuing-based performance analytical model for continuous flow transporters of AMHS. J Donghua Univ (English Ed), 2013, 30(2): 90 http://www.cnki.com.cn/Article/CJFDTotal-DHDY201302002.htm
[8]	陳錦祥, 周炳海. 整體式晶圓連續自動物料搬運系統性能分析. 計算機集成制造系統, 2013, 19(6): 1313 https://www.cnki.com.cn/Article/CJFDTOTAL-JSJJ201306019.htm Chen J X, Zhou B H. Performance analysis for continuous AMHS with united layout. Comput Integr Manuf Syst, 2013, 19(6): 1313 https://www.cnki.com.cn/Article/CJFDTOTAL-JSJJ201306019.htm
[9]	Wang C N, Wang Y H, Hsu H P, et al. Using rotacaster in the heuristic preemptive dispatching method for conveyor-based material handling of 450 mm wafer fabrication. IEEE Trans Semicond Manuf, 2016, 29(3): 230 http://ieeexplore.ieee.org/document/7506080/
[10]	Wang C N, Hsu H P, Tran V V. An improved dispatching method (a-HPDB) for automated material handling system with active rolling belt for 450 mm wafer fabrication. Appl Sci, 2017, 7(8): 780 doi: 10.3390/app7080780
[11]	Hong S, Johnson A L, Carlo H J, et al. Optimising the location of crossovers in conveyor-based automated material handling systems in semiconductor wafer fabs. Int J Prod Res, 2011, 49(20): 6199 doi: 10.1080/00207543.2010.528059
[12]	Lasrado V, Nazzal D. Design of a manufacturing facility layout with a closed loop conveyor with shortcuts using queueing theory and genetic algorithms//Proceedings of the 2011 Winter Simulation Conference. Phoenix, 2011: 1964
[13]	周炳海, 陳錦祥, 趙猛. 基于晶圓優先級的連續型Interbay搬運系統性能分析. 浙江大學學報(工學版), 2015, 49(2): 296 https://www.cnki.com.cn/Article/CJFDTOTAL-ZDZC201502018.htm Zhou B H, Chen J X, Zhao M. Performance analysis for continuous flow transporters of Interbay AMHS with priority rules. J Zhejiang Univ Eng Sci, 2015 49(2): 296 https://www.cnki.com.cn/Article/CJFDTOTAL-ZDZC201502018.htm
[14]	Artalejo J R, Gómez-Corral A. Retrial Queueing Systems, A Computational Approach. Heidelberg: Springer-Verlag Berlin Heidelberg, 1999