Scheduling method for dual-blade cluster tools with parallel chambers and reentrancy constraints

To effectively solve the scheduling problems of dual-blade cluster tools with parallel processing chambers and reentrancy constraints in semiconductor manufacturing, this article introduces a scheduling method centering on optimal searching. Firstly, according to the optimization search rule (FIFO), a mathematical programming model of 4-chamber dual-blade cluster tools with parallel processing chambers and reentrancy constraints was built to minimize the makespan of the system. Combined with the concept of virtual buffer module, an optimum searching algorithm was proposed based on the robot swap strategy. Finally, simulation experiments were conducted for the proposed algorithm, and the results indicate that the algorithm is feasible and effective.