Mechanical properties of aluminum films on magnesium alloys by magnetron sputtering
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摘要: 采用直流磁控濺射法在鎂合金上沉積鋁膜,在高真空下對鋁膜進行加熱后處理.用X射線衍射儀(XRD)分析膜層為純鋁多晶態,掃描電子顯微鏡(SEM)觀察鋁膜晶粒細小.采用納米壓痕/劃痕儀對鋁膜的厚度、臨界附著力、硬度和彈性模量進行了測試,并且用輝光放電光譜儀(GDS)測試了鎂合金表面鋁膜的成分和性能隨薄膜深度的分布.結果表明,鋁膜的厚度隨后處理溫度的升高而降低,其表面硬度和彈性模量高于鎂合金基體并且隨深度增加而逐漸降低.鋁膜與鎂合金基體間存在一個過渡層,結合良好且表現出一定的彈塑性能,有利于鎂合金表面的防護.Abstract: A pure Al film was sputtered by DC magnetron on AZ31B magnesium alloy and heat-treated in a high vacuum. It was determined by the analyses of SEM and XRD that the Al film was ultra-fine polycrystalline. The thickness, critical adhesive force, hardness and elastic modulus of the Al film were measured by nano-indentation/scrateh test; the composition profile and properties were tested by glow discharge spectrometry (GDS). The results show that the thickness of the Al film decreases with increasing heat treatment temperature. Compared with the magnesium alloy, the Al film has a higher surface hardness and elastic modulus which decrease with increasing depth. A transition nano-scale layer forms between the Al film and substrate, which is of adherent trait and reveals somewhat elastoplastic property. It is concluded that the magnesium alloy can be protected by the Al film.
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Key words:
- magnesium alloys /
- magnetron sputtering /
- Al films /
- mechanical properties /
- nano-indentation /
- nano-scratch
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