陣列波導光柵薄膜的制備及性能

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陣列波導光柵薄膜的制備及性能

南錚, 夏洋, 于廣華

文章導航 > 工程科學學報 > 2003 > 25(5): 445-448

南錚, 夏洋, 于廣華. 陣列波導光柵薄膜的制備及性能[J]. 工程科學學報, 2003, 25(5): 445-448. doi: 10.13374/j.issn1001-053x.2003.05.041

引用本文:

南錚, 夏洋, 于廣華. 陣列波導光柵薄膜的制備及性能[J]. 工程科學學報, 2003, 25(5): 445-448. doi: 10.13374/j.issn1001-053x.2003.05.041

NAN Zheng, XIA Yang, YU Guanghua. Fabrication and Performance of Membrane in Arrayed Waveguide Grating[J]. Chinese Journal of Engineering, 2003, 25(5): 445-448. doi: 10.13374/j.issn1001-053x.2003.05.041

Citation:

NAN Zheng, XIA Yang, YU Guanghua. Fabrication and Performance of Membrane in Arrayed Waveguide Grating[J]. Chinese Journal of Engineering, 2003, 25(5): 445-448. doi: 10.13374/j.issn1001-053x.2003.05.041

南錚, 夏洋, 于廣華. 陣列波導光柵薄膜的制備及性能[J]. 工程科學學報, 2003, 25(5): 445-448. doi: 10.13374/j.issn1001-053x.2003.05.041

引用本文:

南錚, 夏洋, 于廣華. 陣列波導光柵薄膜的制備及性能[J]. 工程科學學報, 2003, 25(5): 445-448. doi: 10.13374/j.issn1001-053x.2003.05.041

NAN Zheng, XIA Yang, YU Guanghua. Fabrication and Performance of Membrane in Arrayed Waveguide Grating[J]. Chinese Journal of Engineering, 2003, 25(5): 445-448. doi: 10.13374/j.issn1001-053x.2003.05.041

Citation:

NAN Zheng, XIA Yang, YU Guanghua. Fabrication and Performance of Membrane in Arrayed Waveguide Grating[J]. Chinese Journal of Engineering, 2003, 25(5): 445-448. doi: 10.13374/j.issn1001-053x.2003.05.041

陣列波導光柵薄膜的制備及性能

doi: 10.13374/j.issn1001-053x.2003.05.041

1. 中國科學院微電子中心, 北京 100029;
2. 北京科技大學材料物理系, 北京 100083

基金項目:

國家自然科學基金重點資助項目(No.69936020)

作者簡介:
南錚男,25歲,碩士

中圖分類號: TN304.055;TN252
計量
- 文章訪問數: 128
- HTML全文瀏覽量: 20
- PDF下載量: 7
- 被引次數: 0
出版歷程
- 收稿日期: 2003-01-16
- 網絡出版日期: 2021-08-17

Fabrication and Performance of Membrane in Arrayed Waveguide Grating

1. Microelectronics R&D Center, Chinese Academy of Science, Beijing 100029, China;
2. Materials Science and Engineering School, University of Science and Technology, Beijing 100083, China

摘要: 以一種特定成分的有機硅為原料,采用溶膠-凝膠法,在硅基片上制備出用于光波導器件的薄膜.通過折射率和厚度測試及XPS成分測試驗證了此薄膜具有較好的均勻性、厚度和光學特性,滿足光波導器件的要求.分析了溶膠-凝膠法中常見的龜裂現象的原因以及采預防方法.利用這種薄膜結合微電子加工工藝制備出光波導器件陣列波導光柵.
- 有機硅化合物 /
- 溶膠-凝膠法 /
- 陣列波導光柵 /
- 光波導 /
- 薄膜
Abstract: Waveguide membrane on Si basement was fabricated by So-Gel method with a special kind of organic Si as raw material. After a serial of tests including thickness test, optical test and XPS test, it was concluded that this membrane was thick enough and has good quality. Since Sol-Gel method always causes chap and split, a method how to deal with it was discussed. Finally, how to fabricate an arrayed waveguide grating with the membrane was also introduced.
- organic Si /
- Sol-Gel method /
- arrayed waveguide grating (AWG) /
- waveguide /
- membrane

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文章訪問數: 128
HTML全文瀏覽量: 20
PDF下載量: 7
被引次數: 0

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