Effect of Polyethylene on Low Pressure Diamond Growth from the Vapour Phase
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摘要: 研究了在微波等離子體化學氣相沉積(MPCVD)條件下,聚乙烯對金剛石在單晶硅襯底上形核的影響.發現預先涂覆在硅襯底的聚乙烯顯著地促進了金剛石的形核;提出了聚乙烯促進金剛石形核的機理和具有SP3雜化結構的含碳活化粒子過飽和度概念及其促進金剛石形核的觀點.Abstract: Effect of polyethylene on low pressure diamond growth from the vapour phase was studied. It was found that diamond nucleation on polyethylene coated, un-polished single crystal silicon substrate was greatly enhanced. The mechanism of the observed enhancement and a new concept of the super-saturation of carbonaceous radicales with the SP3 hybridstructure which enhance the nucleation of diamond film have been proposed.
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Key words:
- diamond-films /
- formation-crystal nucleons /
- polyethylene
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