Polishing of CVD Diamond Films by Ion Beam Irradiation
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摘要: 本文采用氬離子束轟擊法,對不同晶體學表面形貌的CVD金剛石膜進行拋光處理。結果表明,對不同表面形貌的金剛石膜,應合理選擇離子束轟擊入射角,提高離子束加速電壓有利于提高拋光效率,(100)擇優生長的金剛石膜最容易得到高的表面平整度。
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關鍵詞:
- 金剛石 /
- 薄膜 /
- 離子束 /
- 拋光/CVD一金剛石
Abstract: To improve the surface roughness of CVD diamond films, ion beam milling was used to polish the film. The results of this experiment indicate that the ideal incident angle of ion beam varies with the surface morphology and that high accelaration voltage of ion beam is beneficial to achieving high polishing rate. It was also found that the film exposing (100) facets can be most easily polished to achieve Ra 28 nm surface roughness.-
Key words:
- diamond /
- film /
- polishing /
- ion beam/cvddiamond
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